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Valve Shutter Hot Gas System Chamber Cleaning Unit Nitrogen Gas Generator PFC Plasma Decomposition Equipment Waste Gas Abatement System Valve Manifold Box Air Combo Air Cushion Packing System Ecology Returnable Box Spectra Gases Products AKZO NOBEL Products PFC / HFC Plasma Decomposition Equipment The PFC / HFC plasma decomposition equipment decomposes PFC and HFC in exhaust gases, and prevents rebonding of decomposed PFC and HFC gases by adding water or oxygen to convert them to processable gases.   Example: Plasma decomposition reaction for CF4 gas CF4  +  2H2O converted to CO2  +  4HF (when H2O is added) CF4  +  O2 converted to CO2  +  2F2 (when O2 is added)   Because plasma decomposition of PFC and HFC gases is done in a vacuum, the PFC / HFC plasma decomposition equipment is installed in the vacuum pipe between the turbo molecule pump and the dry pump on the etcher.   PFC / HFC Plasma Decomposition System The PFC / HFC plasma decomposition system is composed of the following units. Because the plasma decomposition equipment is compact, minimal installation space is required, even if the equipment is added to an existing system.   Control Panel Used to turn on or off the units in the system and to perform interlock in the event of an abnormality PFC / HFC Plasma Decomposition Equipment PFC and HFC gases are converted to processable gases by plasma discharge. Additive Gas Control Unit Adds a fixed amount of gas to the PFC / HFC plasma decomposition equipment. Exhaust Gas Processing Equipment Processes products generated during plasma decomposition of PFC and HFC.   Processable Components and Decomposition Efficiency Gas Flow (sccm) Additive Gas Pressure (mtorr) DRE (%) CF4 300 H2O 500 > 95 O2 > 95 CHF3 400 H2O 500 > 95 O2 > 95 C3F8 130 H2O 500 > 95 O2 > 95 SF6 150 H2O 2,000 > 95 O2 > 95 NF3 1,000 H2O 2,000 > 95 O2 > 95   External Appearance of Plasma Decomposition Equipment