|
|
 |
 |
| Products from Other
Companies |
 |
 |
 |

 |
 |
Excimer Laser
Gas |
|
 |
 |
| · |
KrF Premixed Gas (Ne+F2+Kr) |
| · |
ArF Premixed Gas +(Ne+F2+Ar)(Ne+F2+Ar+He) |
| · |
XeCL Premixed Gas (He or Ne+HCL+Xe) |
|
 |
The Special Gas Department may
have gases of certain mixture ratios in stock. Please inquire
for desired mixtures.
References
|
| |

 |
 |
High-Purity
Gases |
|
 |
 |
Rare Gases |
 |
| · |
Ne (Neon)
Purity: 99.99% to 99.999% or higher
Product in stock (99.999%): 2,000 L (16 L type) or
6,370 L (49 L type) |
| · |
Kr (Krypton)
Purity: 99.9% to 99.999% or higher
Product in stock (99.999%): 100 L (2.8 L type), 500
L (16 L type), and 2,000 L (16 L type) |
| · |
Xe (Xenon)
Purity: 99% to 99.999% or higher
Product in stock (99.999%): 50 L, 100 L, and 200 L
(2.8 L type) |
|
 |
|
 |
Other Gases |
 |
| · |
CH2F2
1. Semiconductor grade (purity: 99.999%)
2. CP grade (purity: 99.9%) |
| · |
CO
1. Semiconductor grade (purity: 99.997%)
2. Research grade (purity: 99.99%) |
|
| |

 |
 |
Standard Gases
for Environmental Measuring |
|
 |
 |
| · |
TO-14
1. 39 to 43 components
2. Aromatic Series
3. Reactive Gases
4. For Adjustment |
| · |
SG-HAPs9 (Priority substances: 9 components) |
| · |
Ozone Monitor (PAMS: 55 components) |
| · |
Gas for Internal Adjustment (1 to 3
types) |
| · |
Mercury(Hg 10-60ug/m3) |
|
 |
References
|
| |

 |
 |
Related Equipment |
|
 |
 |
| · |
Pressure regulator, halogen filter,
and simple emergency gas scrubber |
|
 |
Please inquire separately for
details. |
 |
|